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ECR sputtering system

ShareAid ID：2291

Usage Start Year：

Last Updated：2026/05/20

Model
3400UD
Manufacturer
AFTY
Web Page Of The Product

Campus
Chikushi
Location
Open Innovation Building　First Floor
Description (e.g. Specifications)
Keyword
Category
Deposition Process Equipment

Contact Information

Center for Semiconductor and Device Ecosystem

CSeDE Office

office★csede.oi.kyushu-u.ac.jp
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